MANUFACTURING METHOD OF SINGLE-WALL CARBON NANOTUBE, SINGLE-WALL CARBON NANOTUBE, AND MANUFACTURING METHOD OF ELECTRONIC ELEMENT

摘要

PPROBLEM TO BE SOLVED: To provide a manufacturing method of a single-wall carbon nanotube which can be suitably used for easily manufacturing a high quality single-wall carbon nanotube having a controlled structure, containing a single-wall carbon nanotube of a very small diameter, and having a very narrow distribution of the diameter. PSOLUTION: In this manufacturing method, the single-wall carbon nanotube is grown by chemical vapor deposition method using an alcohol such as ethanol or a gas obtainable by vaporizing an aqueous alcohol solution as a reaction gas. Reaction is carried out by introducing the gas obtained by evaporating the alcohol or the aqueous alcohol solution by spontaneous vaporization at the outside of the reaction zone of the chemical vapor deposition unit. The alcohol concentration of the aqueous alcohol solution is, for example, not lower than 50% but not higher than 95%. PCOPYRIGHT: (C)2007,JPO&INPIT