BACKLASH ELIMINATION MECHANISM IN GEAR MECHANISM, VARIABLE SLIT DEVICE, AND LASER BEAM MACHINING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a backlash elimination mechanism in a gear mechanism capable of forcibly eliminating backlash in a gear mechanism and performing precise drive control.;SOLUTION: In the backlash eliminating mechanism of the gear mechanism for connecting a plurality of gears and transmitting driving force, a coil spring is disposed in an arc shape along the outer periphery of a predetermined gear, and the predetermined gear is constantly urged in the rotational direction by the coil spring. An end of the coil spring is disposed in a fixing system member, and the other end of the coil spring is connected to an outer peripheral part of the predetermined gear.;COPYRIGHT: (C)2007,JPO&INPIT