MAGNETOSTRICTIVE TYPE DYNAMIC QUANTITY SENSOR, AND METHOD OF MANUFACTURING MAGNETOSTRICTIVE TYPE DYNAMIC QUANTITY SENSOR

摘要

PROBLEM TO BE SOLVED: To form both a magnetostrictive film and a pinion respectively by the optimum workings to a torque transmission shaft, and to improve stability of a magnetostritive characteristic in the magnetostrictive film.;SOLUTION: A magnetostrictive type torque sensor is a magnetostrictive type dynamic quantity sensor comprising: a working shaft 62 with a torque acting thereon from an outside; a hollow shaft 61 engaged with the working shaft 62 and connected thereto; the magnetostrictive films 71, 72 formed on an outer circumferential face of the hollow shaft 61; and a detecting part arranged in a periphery of the magnetostrictive films 71, 72 to detect electrically magnetostrictive effects generated in the magnetostrictive films 71, 72. A sensor signal from the magnetostrictive type torque sensor is sufficiently stabilized and a detection precision is improved, by improving the stability of the magnetostritive characteristic.;COPYRIGHT: (C)2007,JPO&INPIT