MICRO-ACTUATOR, MICRO-ACTUATOR ARRAY, OPTICAL SWITCH AND OPTICAL SWITCH ARRAY

摘要

PROBLEM TO BE SOLVED: To hardly cause operational failure by preventing a situation where a movable part sticks to a fixed part not to separate from it.;SOLUTION: A movable plate 12 is provided on a base plate 11 to move up and down and to produce returning force to return to an upper position. The movable plate 12 may receive Lorentz force in the direction from the upper position to a lower position. First stopper members 13, 14 move forward and backward to and from a moving passage of the movable plate 12 according to a first control signal, and in forward moving, the movement of the movable plate 12 is inhibited. Second stopper members 13, 13 move forward and backward to and from the moving passage of the movable plate 12 according to a second control signal, and in forward moving, the movement of the movable plate 12 is inhibited.;COPYRIGHT: (C)2007,JPO&INPIT