PROBLEM TO BE SOLVED: To improve the throughput of a carrier stocker.;SOLUTION: A carrier transfer robot 20 carries a carrier C in between a first delivery port 10 for receiving from an outside the carrier C for containing a substrate and a second delivery port 300 having the carrier C for delivering the substrate to an apparatus 4. The first mounting stage 11 of the first delivery port 10 has a passing gate 12 into which the up-and-down hand 23 of the carrier transfer robot 20 can pass through. The second mounting stage 303 of the second delivery port 300 has a notch 304 into which the up-and-down hand 23 can pass through. Thus, the carrier transfer robot 20 is possible to support and carry the carrier C, so that the high speed transportation of the carrier stocker becomes possible.;COPYRIGHT: (C)2007,JPO&INPIT
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