Distribution facilities it does the earthed electrode on one side of the substrate for thin film formation

摘要

PROBLEM TO BE SOLVED: To provide a highly productive thin film deposition system by plasma discharge provided with a durable shower electrode to make the continuous film depositing time as long as possible and a deposition preventive sheet and a method of manufacturing the shower electrode for the system.;SOLUTION: A grounded electrode is provided on one side of a substrate for thin film deposition in a film deposition chamber, and a high-frequency electrode provided with an electrode main body, a gas inlet and a shower electrode having a gas circulating hole is furnished on the other side to constitute a thin film deposition system for depositing a thin film on the principal plane of the substrate. In this case, a second small rugged face is allowed to overlap a first large rugged face to let the surface of the shower electrode 5 have two large and small average surface roughnesses.;COPYRIGHT: (C)2001,JPO