METHOD OF FINDING RELATIONSHIP AMONG LEAKED SURFACE ACOUSTIC WAVE VELOCITY, CHEMICAL COMPOSITION RATIO AND LINEAR EXPANSION COEFFICIENT OF MATERIAL WITH STRIAE, AND METHOD OF MEASURING TiO2 CONCENTRATION IN TiO2-SiO2 GLASS AND METHOD OF MEASURING LINEAR EXPANSION COEFFICIENT USING THE RELATIONSHIP

摘要

PROBLEM TO BE SOLVED: To provide a method of finding an accurate relationship among a leaked surface acoustic wave velocity, a chemical composition ratio and a linear expansion coefficient required for evaluating TiO₂-SiO₂ glass, by an ultrasonic device for material characteristic analysis.;SOLUTION: The LSAW velocity is measured by preparing a sample having a substrate face perpendicular to a striae face, and a CTE measuring sample plate adjacent thereto, and by bringing a propagation direction of an LSAW into parallel to the striae face, in the area same as the area of measuring the chemical composition ratio and the CTE. The chemical composition ratio is measured in the same area. The CTE is measured in the CTE measuring sample plate. The accurate relationship among the LSAW, the chemical composition ratio and the CTE is obtained based on the LSAW, the chemical composition ratio and the CTE.;COPYRIGHT: (C)2007,JPO&INPIT