INSPECTION METHOD OF LOW-CONTRAST FLAW UNDER CYCLIC NOISE, AND INSPECTION METHOD OF LOW-CONTRAST FLAW UNDER REPEATED PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a flaw inspecting method, capable of excluding conventional defects to rapidly extract the flaw of an image having cyclic noise undetermined in cycle or a repeated pattern, when the contrast of a part other than it is low.;SOLUTION: An X-direction density difference image and a Y-direction density difference image are obtained from the density difference pixel line, between the pixel line of an inspection target and the pixel line in the vicinity thereof or the pixel line present at a position, which is separated by an amount corresponding to the period of the repeat pattern, both of which are obtained with respect to an X-direction and a Y-direction for extracting a flaw candidate by using the intensity of a flaw defined by the density difference value, with respect to the respective pixels and a flaw direction; while a flaw candidate present region is throttled by the density statistic quantity to region division and divided regions, with respect to the extraction result, to extract the flaw by the continuity determination of the flaw.;COPYRIGHT: (C)2007,JPO&INPIT