LASER MEASURING METHOD, LASER CONDITION DETECTION EQUIPMENT, AND LASER CONDITION DETECTION SYSTEM

摘要

PPROBLEM TO BE SOLVED: To provide laser condition detection equipment capable of detecting highly reliably a condition using a self-coupling effect of a semiconductor laser element. PSOLUTION: This laser condition detection equipment for analyzing an irradiation beam superposed with an interference signal generated by the self-coupling effect in the semiconductor laser element to detect a condition up to a measuring object, using the semiconductor laser element for emitting a wavelength-modulated laser beam toward the measuring object, and for introducing the laser beam reflected by the measuring object, is provided, in particular, with a condition detecting photoreceiver provided to receive only the irradiation beam emitted from the laser element, and an object detecting photoreceiver provided to receive only the reflected beam by the object. PCOPYRIGHT: (C)2007,JPO&INPIT