CONTAMINATION WIPING DEVICE, DECONTAMINATION METHOD, AND CONTAMINATION INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a contamination wiping device capable of coping with various conditions on the surface of a wiped object, while keeping pressing force of a wiping member uniform.;SOLUTION: Pressing-directional force acting on a smear head 11 for attaching the wiping member, and moving-directional force of a pressing position are calculated on the basis of force measured by a hexa-axial force sensor 13, a wiping part moving mechanism 12 is controlled to bring the forces within a prescribed range, and the pressing position is changed along the surface of the wiped object 15 to wipe the surface of the wiped object 15, while pressing the smear head 11 onto the surface of the wiped object 15.;COPYRIGHT: (C)2007,JPO&INPIT