Actuator arrangement for the active vibration insulation which uses the payload as an inertial standard mass

摘要

The payload (57) it is the system and method for the active vibration insulation which it makes sever relations from ground operation. As for system, substance (16; 51) with, one spring (45) of making use at least the mass which is supported the substance (51) by (41) with, one further spring (43) of making use at least the further mass which is supported mass (41) by (39) with it possesses. The sensor, mass (41) with further mass (39) with perceives the distance between, forms the distance signal. The controller (49), receiving the distance signal, it forms the control signal which is based on the distance signal. The actuator (47), mass (41) position is operated on the basis of the control signal, the payload which on the one hand, further mass should sever relations the ground (16) from is supported.