The substrate of the disc-like which does not possess the through hole in substrate delivery feature or the substrate holder, or the production mannered null center section of the disk condition record media which uses particular manner are used for the delivery manner

摘要

PROBLEM TO BE SOLVED: To provide a substrate receiving and transferring method in which a disk shaped substrate or the like having no center hole is held in atmospheric environment and moving and mounting of the substrate to a sputtering device is easily conducted.;SOLUTION: Projecting sections are provided at the center sections of both surfaces of a disk shaped substrate. The substrate is integrally transported with an outer mask which covers the outer peripheral tip section and the center sections of the substrate, an inner mask which holds the substrate center and is fixed to the center and a magnet which is used to fix the inner mask. In the receiving and transferring mechanism, the outer mask is held with magnetic attraction. In the substrate holder to and from which the substrate is transferred and received, the outer mask is simultaneously held with magnetic attraction. When transferring and receiving, the magnetic attraction of the receiving and transferring mechanism side is reduced.;COPYRIGHT: (C)2004,JPO