METHOD AND DEVICE FOR TRANSFERRING BOARD USING NON-NEWTONIAN FLUID

摘要

PROBLEM TO BE SOLVED: To solve the problem that transferring a board with rollers and other mechanical devices may result in application of a large stress to the board, thus leading to the deterioration of the board.;SOLUTION: A non-Newtonian fluid is provided to float the board in the non-Newtonian fluid capable of supporting the board. Subsequently, a supply force is added to the non-Newtonian fluid to cause the non-Newtonian fluid to flow so that the flow moves the board along a direction of the flow. This method applies to a device and a system that transfers the board using the non-Newtonian fluid.;COPYRIGHT: (C)2007,JPO&INPIT