Method for forming an out-of-plane structure, out-of-plane structure and device having an out-of-plane structure

摘要

Several methods and structures for improving the yield of out-of-plane micro-device structures including springs and coils (18) are described. In one method the springs (18) used to form out-of-plane structures are constrained via a tether (14) to avoid bunching and entanglement. The high yield structure may be used in numerous electronic applications such as filter circuits. IMAGE