SILICA-BASED COATING FILM, COMPOSITION FOR FORMING SILICA-BASED COATING FILM, METHOD FOR FORMING SILICA-BASED COATING FILM, AND LAMINATED BODY

摘要

PROBLEM TO BE SOLVED: To provide a silica-based coating film capable of sufficiently preventing reflection when it is provided on the surface of a transparent substrate.;SOLUTION: The silica-based coating film is the one to be formed on a transparent substrate and has a refractive index of ≤1.41. A method for forming the silica-based coating film includes: a process for forming a coated film by applying a composition for forming the silica-based coating film on the surface of the transparent substrate; a process for obtaining a dried coated film by removing a solvent contained in the coated film; and a process for firing the dried coated film. Concretely, the composition for forming the silica-based coating film is applied on a silicon wafer by spin coating, and then the solvent contained in the composition is removed, and the coating film is formed on the silicon wafer by curing the resulting composition under a nitrogen atmosphere.;COPYRIGHT: (C)2007,JPO&INPIT