METHOD FOR MANUFACTURING METAL ELEMENT-DOPED LARGE-SIZED QUARTZ GLASS MEMBER AND METAL ELEMENT-DOPED LARGE-SIZED QUARTZ GLASS MEMBER OBTAINED BY THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a large-sized metal element-doped quartz glass member having a bubble-free layer on its surface inexpensively and on a large scale, and a large-sized quartz glass member obtained by the method.;SOLUTION: The method for manufacturing the metal element-doped large-sized quartz glass member comprises charging a metal element-doped quartz powder into a hollow mold of a quartz glass member manufacturing apparatus equipped with the hollow mold freely rotatable horizontally and capable of being decompressed by sucking from its outer circumference, a raw material feeding means and a heating means, and heating to melt the charged quartz powder from the center of the hollow mold while depositing the metal element-doped quartz powder layer on the inner circumference of the hollow mold. The metal element-doped large-sized quartz glass member obtained by the method is also disclosed.;COPYRIGHT: (C)2007,JPO&INPIT