MODELING METHOD OF DEVICE MISMATCH CHARACTERISTIC, AND EXTRACTION DEVICE OF MODEL PARAMETER

摘要

PROBLEM TO BE SOLVED: To provide a modeling method of a device mismatch characteristic and an extraction device of a model parameter capable of optimizing balance between improvement of model error accuracy and shortage of a simulation time.;SOLUTION: Mismatch characteristic data in each size (width W×length L) of a MOS transistor measured by a device measuring part 10 are stored in a measured data storage part 21. A PW analysis part 22 approximates dependency of the device width W of mismatch by a power function of W, and determines a power number PW. A PL analysis part 23 approximates dependency of the device length L of the mismatch by a power function of L, and determines a power number PL. A final analysis part 24 approximates W^PW×L^PL dependency of device characteristic mismatch by a linear function, and determines an inclination α and a segment Voffset. A model output part 30 determines a threshold mismatch model dVth from the four parameters.;COPYRIGHT: (C)2007,JPO&INPIT