Device manufacturing method using an electron beam apparatus provided with the optical element assembly for an electron beam apparatus, a processing method, and such an optical element assembly of the optical element assembly

摘要

PROBLEM TO BE SOLVED: To provide an optical element assembly which can actualize high-level mutual positioning precision for a plurality of optical elements with simple constitution.;SOLUTION: The optical element assembly 1 is equipped with a plurality of lenses 31, 33, and 35, a cylinder body 10 which stores the lenses 31, 33, and 35 inside, and holders 20A, 20B, and 20C which are fitted to the cylinder body and arranged coaxially with the center axis of the cylinder body at equal intervals on the same circumference and hold the respective lenses in a position- adjustable state. This optical element assembly is manufactured as a unit and built integrally in a lens barrel which carries the optical system of an electron- beam device.;COPYRIGHT: (C)2003,JPO