B-A TYPE HOT CATHODE IONIZATION VACUUM GAUGE

摘要

PROBLEM TO BE SOLVED: To stabilize an apparatus in a B-A type hot cathode ionization vacuum gauge, and to release adsorption gas in a short time.;SOLUTION: In this B-A type hot cathode ionization vacuum gauge comprising a set of hot cathodes, a helical electrode 7 is placed between the hot cathodes and a bulb wall, the helical electrode 7 bringing about a shielding effect and a heat generating effect in energization.;COPYRIGHT: (C)2007,JPO&INPIT