MACRO ARRANGEMENT DESIGN DEVICE WITH CONSIDERATION GIVEN TO DENSITY, PROGRAM, AND DESIGN METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pattern density check program, its device, and its method for calculating a pattern density for each layer from a layout of one chip including a scribe frame and finding a pattern density error early for reduction in occurrence of a return process and in a TAT.;SOLUTION: This pattern density check program makes a computer execute a first step S1 and a second step S3. In the first step S1, mask data 101 are read into the computer having a storage part storing chip data for a pattern density check objective chip and its mask data, and from the mask data 101, a scribe frame model having a data rate of the scribe frame for one chip of the density check objective chip is generated. In the second step S3, The chip data 102 are read, and density check for one chip is carried out based on a combination of the chip data and the scribe frame model.;COPYRIGHT: (C)2007,JPO&INPIT