IRRADIATION DOSE MONITOR AND IRRADIATION DOSE MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an irradiation dose monitor and an irradiation dose measuring method capable of precisely and rapidly measuring an exposure dose of charged particle beams such as a low-energy electron beam of about 300 keV or less utilized in polymerization, cross-linking, grafting, sterilization, disinfection, and printing ink fixing, while preventing heat generation and without cost increase.;SOLUTION: A high resistance diamond layer 1 is formed on a silicon substrate 2 and its electron beam irradiation region is removed of the substrate 2, and only the diamond layer 1 exists independently. An electrode 3 and an electrode 4 are formed on both sides of the diamond layer 1 in this electron beam irradiation region. Lead wires 5, 6 are connected to each electrode 3, 4 and a bias voltage is to be impressed on the electrodes 3, 4 through the lead wires 5, 6.;COPYRIGHT: (C)2007,JPO&INPIT