Production method of advanced micro mirror arrangement element and advanced micro mirror arrangement element

摘要

The micro mirror arrangement element of 1 dimensions or 2 dimensions 1st layer and consists of the element baseplate which possesses 2nd layer, has consisted of the control circuit which is arranged with respect to the aforementioned 1st layer and the plural micro mirrors which are arranged with respect to the aforementioned 2nd layer. Each micro mirror substantially optical flat with plane surface, consists of the plane surface reflecting interface which does not have unevenness. It is used the arrangement element of 1 dimensions or 2 dimensions of this kind of micro mirror element, the spatial optical modulator (SLM) as. Also the method of producing the micro mirror arrangement element is disclosed. This production method produces the control circuit with respect to 1st layer, includes the fact that the micro mirror with respect to 2nd layer is produced, 1st layer and offers the element baseplate which consists of 2nd layer. Here, as for the surface of the micro mirror of 2nd layer, there is no unevenness, substantially optical flat it is plane surface. Selective figure Figure 8M