Microprocessing vibrating structure and it is related the micro gyroscope

摘要

The structure has an anchoring end (5) integrated to a fixed support (6), and a vibrating wall (7) comprising a base (8) and a free end (9). Stationary or progressive waves are generated in the vibrating wall. A naturally uncoupled zone is located between the anchoring end and the free end of the vibrating wall. The anchoring end is constituted by the base of the vibrating wall. - An INDEPENDENT CLAIM is also included for a microgyrometer comprising a micro-machined vibrating structure.