MANUFACTURING METHOD FOR MICROLENS SHEET, THE MICROLENS SHEET, MANUFACTURING METHOD FOR PROJECTION SCREEN AND THE PROJECTION SCREEN

摘要

PPROBLEM TO BE SOLVED: To provide a manufacturing method and the like for a microlens, whereby when recesses for forming microlenses are formed, improved discharge properties of foreign matter from etching holes is ensured while a satisfactory shape is held. PSOLUTION: The manufacturing method for a microlens sheet 3 having the plurality of microlenses 3a includes a step of disposing an etching mask film 12 onto a substrate 11; a step of forming a thin film 15 around etching holes 13 on the etching mask film 12; a first etching step of etching the thin film 15 at the same time as etching the substrate 11 via the etching holes 13; a second etching step of etching the substrate 11 via openings 15r made by etching the thin film 15; a step of removing the etching mask film 12 from the substrate 11; and a step of transferring recesses 14, formed in the substrate 11, to a resin sheet 17. PCOPYRIGHT: (C)2007,JPO&INPIT