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Being the resistance plasma fluorine alumina ceramic material and the gas spreading shield grain
Being the resistance plasma fluorine alumina ceramic material and the gas spreading shield grain
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机译:作为电阻等离子体氟氧化铝陶瓷材料和气体扩散屏蔽颗粒
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摘要
A plasma fluorine resistant polycrystalline alumina ceramic material is produced by forming a green body including alumina and a binder, and sintering the green body for a time from about 8 to 12 hours. The area % of unsintered particles in the polycrystalline alumina ceramic material does not exceed 0.1 area %, resulting in reduced emission of particles from the material after exposure to plasma fluorine. IMAGE
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