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Being the fuse structure division which the fuse structural null multiple which includes the crack stop between the contiguity fuses
Being the fuse structure division which the fuse structural null multiple which includes the crack stop between the contiguity fuses
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机译:是包括连续熔断器之间的裂纹止损的熔断器结构无效倍数的熔断器结构分区。
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摘要
A fuse structure in an integrated circuit chip is described that includes an insulated semiconductor substrate; a fuse bank integral to the insulated semiconductor substrate consisting of a plurality of parallel co-planar fuse links; and voids interspersed between each pair of the fuse links, the voids extending beyond a plane defined by the co-planar fuse links. The voids surrounding the spot to be hit by a laser beam during fuse blow operation act as a crack stop to prevent damage to adjacent circuit elements or other fuse links present. By suitably shaping and positioning the voids, a tighter pitch between fuses may be obtained. IMAGE
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