Inside the reaction cylinder the removal damage device and the removal damage mannered

摘要

PROBLEM TO BE SOLVED: To provide a device and method for removing harm from waste gas in which an electric heater is protected from strong corrosive gas and also to enable sufficiently removing harm within the range of heat-resistance temperatures of heater material, the difference in temperature between the space of a reaction tube and the heater can be lessened when gaseous fluorine used in cleaning treatment of a semiconductor and liquid crystal manufacturing process is oxidized and decomposed using the electric heater as a heat source. ;SOLUTION: In a reactor tube 3 whose inner wall is all coated with ceramic material, a bottomed inner tube 4 made of dense ceramics is housed. In the inner tube 4, electric heating elements 1 of either of metallic and nonmetallic systems are arranged, exposed and hung. To the lower part of the inner tube 4, a gaseous N₂ introducing pipe 7 communicating with the inner space of the inner tube 4 is connected. The top of the inner tube 4 is open. To the reaction tube 3, waste gas introducing pipes 5 for introducing gas to be treated and air introducing pipes 6 for introducing fresh air or gaseous O₂ are connected.;COPYRIGHT: (C)1999,JPO