In residual stress measuring method of the wire rod and the occasion where residual stress

摘要

PPROBLEM TO BE SOLVED: To provide a residual stress measuring method of a wire material capable of certainly measuring the residual stress of an extremely fine wire material used, for example, in wire bonding or the like. PSOLUTION: Parts 13a and 13b are successively removed from the end surface 1a of the extremely fine wire 1 along a longitudinal direction by ion beam processing. When a warpage quantity produced at a residual part 15 including the end surface 1a is set to h, the Young's modulus of the extremely fine wire 1 is set to E, the outer diameter of the extremely fine wire 1 is set to D and the length of the residual part 15 is set to l, the residual stress σ of the extremely fine wire 1 is estimated as σ=0.2878×E×D×2h/lSP2/SP. PCOPYRIGHT: (C)2006,JPO&NCIPI