The nonmetallic inclusion and stress measuring method of the minute territory features that

摘要

PROBLEM TO BE SOLVED: To provide a stress measuring method for a microscopic area of metal and an instrument therefor.;SOLUTION: This stress measuring method for a microscopic area of metal is characterized by being equipped with the following processes 1 to 4. 1: An irradiation process for irradiating an electron beam to a metal specimen. 2: A condensing process for condensing light emitted from the specimen by the irradiation. 3: A dispersion process for dispersing the light condensed in the condensing process to acquire spectra. 4: A stress calculation process for comparing the spectrum of the specimen in a zero stress state with the spectrum of the specimen with residual stress existing therein to calculate the residual stress from the peak shift of the two spectra. An external force application process for applying an external force to the specimen can be provided before the process 1. By this method, stress measurement can be performed in an ultramicroscopic area of metal.;COPYRIGHT: (C)2005,JPO&NCIPI