Flow management method and flow management device of the substrate processing apparatus

摘要

PROBLEM TO BE SOLVED: To facilitate the designation of flow and achieve the improvement of board carriage efficiency by a carry mean, by forming flow information on the carriage of boards in such form that the processing part planned not to be used is added or mixed as option information to board carriage procedure, and selecting and designating this. ;SOLUTION: MTR (carry robot) is specified from a recipe table by recipe No., and from this the flow No. and the option No. to designate the processing part for non use are specified, and, from the flow table, the step position of the processing part for non use is specified. When the recipe No. is transferred together with the delivery of boards to MTRs 31 and 32, a processing control means judges whether the step position of the processing part not to be used is the processing part in the next processing or not from the specified option No. MTRs 31-33 performs the delivery by carrying a board (B) to the processing part in this next processing when the processing part in the next processing is not non use, and it passes the processing part in the next processing when the processing part in the next processing becomes non use.;COPYRIGHT: (C)1997,JPO