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The substrate which possesses the optical communication system null acousto-Optics acoustooptics effect which uses the optical

机译:具有光通信系统的基板使用光的零声光声光效应

摘要

PROBLEM TO BE SOLVED: To embody an efficient plane surface acoustic wave(SAW) waveguide and to increase the degree of freedom in design for control of filter characteristics by forming a thin film on the surface of a substrate and forming the substrate surface as a ridge structure. ;SOLUTION: The transparent thin film 18 of SiO2, etc., is formed in approximately the same direction as the direction of optical waveguides 11, 12 for propagation in an approximately X- or Y-axis direction formed within the surface of the LnNbO3 substrate in such a manner that the substrate surface is formed to the ridge shape. Namely, the optical waveguides 11, 12 extending in the y-axis direction are formed on the x-cut LnNbO3 substrate 10 and a transducer 15 for generating SAW is formed thereon. A SAW absorber consisting of a resist is formed between the light input side of the LnNbO3 substrate 10 and the transducer 15. The thin film 18 for the SAW waveguide consisting of the SiO2 film having the refractive index lower than the refractive index of the LnNbO3 substrate is formed on the waveguide behind the same. The SAW absorber 20 consisting of the resist is formed in front of an electrode and at the final point of the thin film 18 for the SAW waveguide.;COPYRIGHT: (C)1999,JPO
机译:解决的问题:体现一种有效的平面声波(SAW)波导,并通过在基板表面上形成薄膜并将基板表面形成为脊来提高控制滤波器特性的设计自由度。结构体。 ;解决方案:SiO 2 等透明薄膜18形成在与光波导11、12的方向大致相同的方向上,以在大约X或Y轴方向上传播在LnNbO 3 衬底的表面内形成的衬底以形成为脊状的方式形成。即,在x切割的LnNbO 3 基板10上形成沿y轴方向延伸的光波导11、12,并在其上形成用于产生SAW的转换器15。在LnNbO 3 衬底10的光输入侧和换能器15之间形成由抗蚀剂构成的SAW吸收体。SAW波导用薄膜18由SiO 2 3 衬底的折射率的Sub>膜形成在其后方的波导中。在电极的前面和用于SAW波导的薄膜18的终点处形成由抗蚀剂组成的SAW吸收体20。版权所有:(C)1999,JPO

著录项

  • 公开/公告号JP3861395B2

    专利类型

  • 公开/公告日2006-12-20

    原文格式PDF

  • 申请/专利权人 富士通株式会社;

    申请/专利号JP19970216050

  • 发明设计人 中沢 忠雄;清野 實;谷口 眞司;

    申请日1997-08-11

  • 分类号G02F1/125;

  • 国家 JP

  • 入库时间 2022-08-21 21:07:42

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