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MONOLITHIC MEMS-BASED WAVELENGTH-SELECTIVE SWITCHES AND CROSS CONNECTS
MONOLITHIC MEMS-BASED WAVELENGTH-SELECTIVE SWITCHES AND CROSS CONNECTS
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机译:基于单晶片MEMS的波长选择开关和交叉连接
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摘要
Wavelength-selective 1×N switches (WSSs) and N×N cross-connects (WSXCs) are described which are fabricated as monolithic or hybrid devices. In a preferred embodiment, the optic ports, dispersion elements, and collimating elements are formed on a single monolithic substrate. A micromirror and actuator are either fabricated within the substrate or a separate micromirror is utilized forming a hybrid WSS or WSXC. The optical elements can be formed in an opaque substrate layer (e.g., silicon, SOI, and so forth) or in an optically transparent layer of a PLC material (e.g., silica-on-silicon). Embodiments describe the use of linear and rotary comb drives for actuating front surface mirrors, or solid-immersion micromirrors (SIMs). The switching devices reduce system footprint while reducing or eliminating the need for alignment of the optical elements.
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