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Method of performing multiple stage model calibration for optical imaging simulation models
Method of performing multiple stage model calibration for optical imaging simulation models
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机译:对光学成像仿真模型进行多阶段模型校准的方法
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摘要
A method of calibrating a simulation model of a photolithography process. The method includes the steps of defining a set of input data; defining a simulation model having model parameters which affect the simulation result produced by the simulation model; performing a first stage calibration process in which the model parameters and alignment parameters are adjusted such that the simulation result is within a first predefined error tolerance; and performing a second stage calibration process in which the alignment parameters are fixed and the model parameters are adjusted such that the simulation result is within a second predefined error tolerance.
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