首页> 外国专利> Pusher assemblies for use in microfeature device testing, systems with pusher assemblies, and methods for using such pusher assemblies

Pusher assemblies for use in microfeature device testing, systems with pusher assemblies, and methods for using such pusher assemblies

机译:用于微特征设备测试的推进器组件,具有推进器组件的系统以及使用这种推进器组件的方法

摘要

Pusher assemblies for use in microelectronic device testing systems and methods for using such pusher assemblies are disclosed herein. One particular embodiment of such a pusher assembly comprises a plate having a first side and a second side opposite the first side. An engagement assembly is removably coupled to the second side of the plate and positioned to contact a microfeature device being tested. The pusher assembly can include an urging member proximate the first side of the plate and configured to move the engagement assembly toward the device being tested. The pusher assembly can also include a heat transfer unit carried by the first side of the plate. In several embodiments, the pusher assembly can further include a plurality of pins carried by the engagement assembly such that the pins extend through the plate and engage the urging member to restrict axial movement of the urging member toward the device being tested.
机译:本文公开了用于微电子装置测试系统中的推动器组件以及使用这种推动器组件的方法。这种推动器组件的一个特定实施例包括板,该板具有第一侧和与第一侧相对的第二侧。接合组件可移除地联接到板的第二侧,并且被定位成接触被测试的微特征装置。推动器组件可包括靠近板的第一侧的推动构件,该推动构件构造成使接合组件朝着被测试的设备移动。推动器组件还可包括由板的第一侧承载的传热单元。在几个实施例中,推动器组件可以进一步包括由接合组件承载的多个销,使得销延伸穿过板并接合推动构件,以限制推动构件朝向被测试装置的轴向运动。

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