首页>
外国专利>
Method for the removal of airborne molecular contaminants using extra clean dry air
Method for the removal of airborne molecular contaminants using extra clean dry air
展开▼
机译:使用超净干燥空气去除空气中分子污染物的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the interior of the device, contacting at least a portion of the interior surfaces. A contaminated purge gas is produced by transferring a portion of the contamination from the interior surfaces into the purge gas. The contaminated purge gas is removed from the device and the process is, continued until the contaminant concentration in the contaminated purge gas is below a predetermined level.
展开▼