Probe head with vertical probes, method for manufacturing the probe head and probe card using the probe head

摘要

A vertical probe head primarily comprise a substrate, a trace layer, and a plurality of vertical probes where the substrate has a first surface, a second surface, and a plurality of device holes penetrating through the first surface and the second surface. The trace layer is formed on the first surface. Each vertical probe has a bonding end and a probing end where the bonding ends are inserted into the device holes of the substrate and are electrically connected to the trace layer and the probing ends are protruded away from the second surface of the substrate. Resins are filled into the device holes to firmly fix the vertical probes so that the vertical probes will not easily be bent nor damaged.