Methods for forming rhodium-containing layers such as platinum-rhodium barrier layers

摘要

A method of forming a rhodium-containing layer on a substrate, such as a semiconductor wafer, using complexes of the formula L_yRhY_z is provided. Also provided is a chemical vapor co-deposited platinum-rhodium alloy barriers and electrodes for cell dielectrics for integrated circuits, particularly for DRAM cell capacitors. The alloy barriers protect surrounding materials from oxidation during oxidative recrystallization steps and protect cell dielectrics from loss of oxygen during high temperature processing steps. Also provided are methods for CVD co-deposition of platinum-rhodium alloy diffusion barriers.