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Semiconductor inspecting apparatus having device for cleaning tip of probe card and method for cleaning the tip
Semiconductor inspecting apparatus having device for cleaning tip of probe card and method for cleaning the tip
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机译:具有用于清洁探针卡的尖端的装置的半导体检查设备以及用于清洁尖端的方法
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摘要
An apparatus for inspecting a semiconductor and a method for automatically cleaning the tip of a probe card may include an inspection chamber having a probe card for inspecting a wafer, and a chemical-wetting chamber for applying a chemical agent to a cleaning member. The inspection chamber and the chemical-wetting chamber may be integral parts of the apparatus.
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