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Use of optical fourier transform for dimensional control in microelectronics
Use of optical fourier transform for dimensional control in microelectronics
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机译:光学傅里叶变换在微电子学中的尺寸控制中的应用
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摘要
A device for measuring the dimensional or structural characteristics of an object. A detector forms an optical Fourier transform image of an elemental surface of the object in an image focal plane. A processor produces data relating to at least one dimensional and/or structural characteristic of the object from the information provided by the detector.
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