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Active damper with counter mass to compensate for structural vibrations of a lithographic system
Active damper with counter mass to compensate for structural vibrations of a lithographic system
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机译:具有平衡质量的主动阻尼器,可补偿光刻系统的结构振动
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摘要
Methods and apparatus for actively damping vibrations associated with a optical assembly of a photolithographic system are disclosed. According to one aspect of the present invention, an assembly that provides damping to a structure of a photolithographic apparatus that is subject to structural oscillations includes a counter mass, an active mechanism, an a controller. The active mechanism is coupled to the structure, supports the counter mass, and applies a force to the structure to counteract structural oscillations in the structure. The controller controls the force applied by the active mechanism on the structure, and utilizes information associated with movement of the structure to control the force.
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