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Facet mirrors and a method for producing mirror facets
Facet mirrors and a method for producing mirror facets
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机译:刻面镜和生产镜刻面的方法
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摘要
In a method for producing mirror facets (1) for facet mirrors in illuminating devices or projection exposure machines in microlithography by using radiation in the extreme ultraviolet range, individual tilting angles are recessed into an optical surface (2) of the mirror facet (1), preferably a surface with tilting angles relative to a reference surface of the mirror facet (1) is machined into or on said optical surface.
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