Method and apparatus for simultaneously measuring displacement and angular variations

摘要

Disclosed herein is a method and apparatus for simultaneously measuring a displacement and angular variations. The method and apparatus of the present invention allows light radiated from a single light source to be placed along a light axis so as to simultaneously measure a distance (displacement) and angular variations that are different physical quantities, so that the displacement and angular variations of the measuring device of a precision measuring apparatus or machining device of a machine tool moved by a stage can be simultaneously measured without an Abbe error.