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LASER RESIST TRANSFER FOR MICROFABRICATION OF ELECTRONIC DEVICES
LASER RESIST TRANSFER FOR MICROFABRICATION OF ELECTRONIC DEVICES
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机译:用于电子设备微细加工的激光抗蚀剂转移
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摘要
A method for forming a resist pattern on a substrate (18) places a donor element (12) having a layer of thermoresist material proximate the substrate. A gap is maintained such that the surface of the layer of thermoresist material is spaced apart from the surface of the substrate by a number of spacing elements. Thermal energy is directed toward the donor element (12) according to the resist pattern, whereby a portion of thermoresist material is transferred from the donor element (12) across the gap by ablative transfer and is deposited onto the substrate (18) forming the resist pattern.
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