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Droplet applying method and droplet applying device, and device and electronic equipment

机译:液滴施加方法,液滴施加装置,装置及电子设备

摘要

Exemplary embodiments enable formation of a uniform film and a pattern with a minute line width and generate no or substantially no quality defects, such as disconnection. A droplet is discharged from a droplet discharging head to apply in a predetermined region on a surface of a substrate while relatively moving the droplet discharging head and the substrate. The droplet is discharged with respect to the surface of the substrate in a direction intersecting with a vertical direction, and when relatively moving the droplet discharging head and the substrate to discharge the droplet, the droplet is discharged along the relative movement direction.
机译:示例性实施例使得能够形成具有微小线宽的均匀膜和图案,并且不产生或基本上不产生诸如断开的质量缺陷。从液滴排放头排放液滴,以在使液滴排放头和基板相对移动的同时施加在基板表面上的预定区域中。在与垂直方向相交的方向上相对于基板的表面排出液滴,并且当使液滴排出头和基板相对移动以排出液滴时,沿着相对移动方向排出液滴。

著录项

  • 公开/公告号US2007054060A1

    专利类型

  • 公开/公告日2007-03-08

    原文格式PDF

  • 申请/专利权人 HIROTSUNA MIURA;

    申请/专利号US20060593070

  • 发明设计人 HIROTSUNA MIURA;

    申请日2006-11-06

  • 分类号B05D1/02;B05C5/00;B32B9/00;

  • 国家 US

  • 入库时间 2022-08-21 21:02:04

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