Multi-gas/vapor electrochemical sensor for the detection and monitoring of chemical and biological agents

摘要

A silicon substrate device is formed to include circuitry for testing for various agents of interest. The novel solid state miniaturized microprocessor based electro-chemical sensor device includes a substrate with a plurality of electrodes formed thereon for sensing the various agents of interest. A cell structure includes electrodes deposited over silicon dioxide over a silicon substrate. Circuitry is formed within a semiconductor portion formed within a portion of the silicon substrate or, alternatively, formed in a separate solid state device or substrate material (doped substrate to generate biasing voltages to the electrodes in the silicon substrate to detect the agent of interest. A polymer film or membrane is formed upon the electrodes to receive and pass the agent of interest to allow detection by the electrodes.