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Apparatus for rapid model calculation for pattern-dependent variations in a routing system
Apparatus for rapid model calculation for pattern-dependent variations in a routing system
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机译:用于路由系统中与模式相关的变化的快速模型计算的设备
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摘要
The invention details apparatus for rapid calculation of models for routing patterns. The calculation comprises learning or self-adapting mechanisms to gradually improve its accuracy. The outputs from such calculation can be used by a routing system to select routing patterns to control variations from manufacturing process. Depending on the model selection, the application areas include but not limited to yield, process window, and timing variations.
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