Method for manufacturing metal oxide hollow nanoparticles and metal oxide hollow nanoparticles manufactured by the same

摘要

Provided is a method for manufacturing a metal oxide hollow nanoparticles with excellent properties more easily and simply by a chemical vapor condensation employing metal β-diketonates as precursors, and a metal oxide hollow nanoparticles manufactured by the method. The method includes: preparing metal β-diketonate as a precursor; evaporating the metal β-diketonate at a predetermined temperature higher than a melting point of the metal β-diketonate; transferring the evaporated metal β-diketonate into a reaction region; thermally decomposing the transferred gaseous metal β-diketonate and simultaneously inducing a reaction of the transferred gaseous metal β-diketonate with oxygen to synthesize the metal oxide hollow nanoparticle; and condensing and collecting the synthesized metal oxide hollow nanoparticles.