Method and structure of patterning landing pad structures for spatial light modulators

摘要

A spatial light modulator. The spatial light modulator includes a first substrate and a standoff structure coupled to the first substrate. The spatial light modulator also includes a mirror structure coupled to the standoff structure. The mirror structure includes a mirror body comprising at least one edge region and at least one end region, a reflective layer coupled to the mirror body, and a flexible member coplanar with the mirror body. According to an embodiment of the present invention, the mirror structure rotates about the flexible member to an activated position. In the activated position, the at least one edge region of the mirror body makes contact with the standoff structure while maintaining the at least one end region free from contact with the first substrate.