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Substrate bonding apparatus having alignment system with one end provided inside vacuum chamber for liquid crystal display device
Substrate bonding apparatus having alignment system with one end provided inside vacuum chamber for liquid crystal display device
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机译:具有对准系统的基板接合装置,该对准系统的一端设置在用于液晶显示装置的真空室内部
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摘要
A substrate bonding apparatus for a liquid crystal display device includes a vacuum processing chamber, a lower stage provided in an interior of the vacuum chamber, an upper stage provided in the interior of the vacuum chamber and having at least one first through hole, a stage moving system having a stage moving axis connected to one of the lower and upper stages, and a driving motor, and at least one first alignment system having one end provided in the interior of the vacuum chamber for aligning a first substrate and a second substrate.
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