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Optical encoder having a light source scale and photodetector and an optical lens module using the optical encoder
Optical encoder having a light source scale and photodetector and an optical lens module using the optical encoder
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机译:具有光源标尺和光电探测器的光学编码器以及使用该光学编码器的光学透镜模块
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摘要
A reflective type optical encoder has a light source, a scale which moves relatively with respect to the light source and which has a periodic optical pattern, and a photodetector which can detect a change in an intensity pattern of a light beam that is emitted from the light source and is reflected and modulated by the scale. The photodetector and a concave portion are formed on a semiconductor substrate, the light source is disposed at the concave portion on the semiconductor substrate, a slit is also disposed on the concave portion, and the light beam emitted from the light source irradiates the scale after passing through the slit.
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